依据新型航天红外组件寿命试验设备的真空系统的技术要求,设计了具有两套抽气系统的全自动化高真空排气台,主真空系统以机械泵和分子泵作为前级泵,溅射离子泵作为主抽泵;辅助真空系统由机械泵和分子泵组成,用于主系统预抽。该真空系统采用计算机控制技术程控真空排气工艺,为多工位结构,具有全自动化的功能。根据理论计算分析,该设备能满足红外组件寿命试验对真空的要求。

Based on the requirements of the vacuum system for the new aging tests of the space infrared device, this paper presents a design of a fully automatic high vacuum exhaust station with two sets of pumping system. One is the main vacuum system with a mechanical pump and a molecular pump as the backing pump and a sputter ion pump as the main pump; the other is the auxiliary vacuum system composed of a mechanical pump and a molecular pump, used for pre-pumping. With the computer control technology, this multi-station structure system enjoys automatic functions. The theoretical calculation analysis shows that this system can meet the vacuum requirements for the aging tests of the infrared device.