Capilary Stiction Action in the MEMS/NEMS

Science & Technology Review ›› 2009, Vol. 27 ›› Issue (0902) : 99-101.

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PDF(297 KB)
Science & Technology Review ›› 2009, Vol. 27 ›› Issue (0902) : 99-101.
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Capilary Stiction Action in the MEMS/NEMS

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 27(0902): 99-101

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