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Science & Technology Review  2018, Vol. 36 Issue (6): 77-82    DOI: 10.3981/j.issn.1000-7857.2018.06.009
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Development of implantable silicon neural microelectrodes
PEI Weihua1,2,3
1. State Key Laboratory of Integrated Optoelectronics;Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2. Center for Excellence in Brain Science and Intelligence Technology, Chinese Academy of Sciences, Shanghai 200031, China;
3. School of Future Technology, University of Chinese Academy of Sciences, Beijing 100049, China

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