%A %T Pros pe cts for the De velopment of the Microele ctronic Te chnology in the 21st Century %0 Journal Article %D 1999 %J Science & Technology Review %R %P 11-13 %V 17 %N 993 %U {http://www.kjdb.org/CN/abstract/article_4259.shtml} %8 1999-03-10 %X