Dynamic Measurement of Parameters of MEMS Based on Correlation of Blurred Image
LUO Yuan1, YANG Bo1, ZHANG Yi2
1. College of Photoelectric Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, China;2. College of Automation, Chongqing University of Posts and Telecommunications, Chongqing 400065, China
Abstract：In the measurement of MEMS resonator's dynamic parameters, because the fuzzy synthesis technology does not require a high camera image sampling rate to obtain a high measuring accuracy, so in the actual measurement system it finds a wide application. Based on the study of the blurred image correlation, this paper proposes a technique of dynamic measurement of MEMS parameters for the exact motion tracing. Through computing the distance between two correlated peaks of the first order differential blurred image of the autocorrelation function, the dynamic amplitude of micro-resonators can be obtained. This algorithm is carried out in the spatial domain, the results will not be affected by the resolution of the transform domain, and the measurement accuracy can be improved by interpolation. And through the experimental analysis, the cause of forming the interference peak is clearly identified, and a solution is found and tested. Experimental results show that in this way, the dynamic parameters of MEMS resonators can be effectively measured, and the method is simple, requiring only to collect a fuzzy image of MEMS resonator in the stable state, a small amount of data, and can be used in the online measurement.