随着硅片需求量迅速增加,其在切割过程中使用切割液形成了大量的切割废液.对新能源硅产业生产切割技术概况、碳化硅切割废料在线回收工艺和离线回收工艺进行论述.重点介绍切割废液离线回收工艺中的物理法和化学法及研究展望.结果表明,国内外对切割废液的回收利用从单一回收碳化硅到综合回收碳化硅、聚乙二醇和硅已成为发展的趋势.切割废液的离线回收工艺中物理法具有能耗小、工艺简单、设备造价低和易于工业化等优点.其中选择有效的捕收剂利用泡沫浮选技术分离方法,操作简单,分离效率高,具有潜在应用价值,是当前研究重点.化学法通过原料的转化,在制得新产品同时回收碳化硅物料,物料回收纯度高,具有一定的潜力,需要作进一步研究.

With the rapidly increasing demand of the silicon wafer, due to the use of the cutting fluid in the cutting process, a large amount of cutting waste liquid will be produced. This paper reviews the researches of the production and cutting techniques, the online recycling process and the offline recycling process of the silicon carbide cutting waste in the new energy resource silicon industry, with focuses on the physical and chemical methods in the offline recycling process used to recycle the cutting waste liquid. It is shown that the comprehensive recovery of the silicon carbide, the polyethylene glycol and the silicon, instead of only recycling the silicon carbide, is the trend. The physical methods in the offline process have advantages of low energy consumption, simple process, low-cost equipment and easiness for industrialization. Among the physical methods, the separation method of the electing effective collector and using the forth floatation technology is simple to operate and enjoys a high separation efficiency, and it becomes the key of the current research. The chemical methods depend on the transformation of the raw materials to produce the new product and to recycle the silicon carbide at the same time. The recovered materials have a high purity. This method has potential applications and deserves further researches.