化学法制备SrTiO3薄膜成本低、效率高，适合用于YBa2Cu3O7-δ（YBCO）涂层导体的缓冲层。采用全化学溶液沉积法在Ni-5W金属基带上外延生长了SrTiO3（STO）缓冲层薄膜。以乙酸盐、钛酸丁酯为原料配制均匀稳定的STO种子层、LaxSr1-xTiO3种子层和STO 缓冲层前驱溶液。研究了STO 种子层薄膜厚度对在STO/Ni-5W（200）上沉积STO 外延薄膜性能的影响，结果表明，在880℃烧结温度下制备的3 层STO 种子层上可以制备出表面光滑平整、具有（200）择优取向的STO 缓冲层。尝试将La 元素掺入STO 中制得稳定的LSTO 前驱液，在LSTO/Ni-5W 结构上制备了具有（200）择优取向的STO 缓冲层薄膜，可作为YBa2Cu3O7-δ涂层导体的缓冲层。
The SrTiO3 films prepared by chemical method possess features of low-cost and efficiency, and they are a promising buffer layer for YBCO coated conductors. STO buffer layers were prepared on Ni-5W substrate by chemical solution deposition. Acetate and tetrabutyl titanate were used as precursors to synthesize the precursor solutions of STO seed layers, LaxSr1-xTiO3 seed layers and STO buffer layers. Effect of the thickness of STO seed layers on the properties of SrTiO3 epitaxial films prepared on STO/Ni-5W(200) structures was studied. The results showed that three multilayer STO seed layers were sintered at 880℃ which was favorable to fabricate (200)-oriented STO films with smooth surface. When La was added into STO, stabilized LSTO precusor solution could be obtained, and highly (200)-oriented STO buffer films were prepared on LSTO/Ni-5W structures. They can be a promising buffer layer for YBa2Cu3O7-δ coated conductors.
[1] Xu D, Wang Y, Liu L F, et al. Dependences of microstructure and critical current density on the thickness of YBa2Cu3O7-x film prepared by pulsed deposition on buffered Ni-W tape[J]. Thin Solid Films, 2013, 529: 10-14.
[2] 罗清威, 冉阿倩, 李凤华, 等. 金属有机沉积法制备SrTiO3薄膜[J]. 材料与冶金学报, 2011, 10(3): 193-197. Luo Qingwei, Ran Aqian, Li Fenghua, et al. Preparation of SrTiO3 thin films by metal organic deposition method[J]. Journal of Materials and Metallurgy, 2011, 10(3): 193-197.
[3] Narayanan V, Driessche I V. Effect of polymer inclusion in preparation of thick LZO buffer layers for YBCO coated conductors[J]. Journal of Materials Science & Technology, 2013, 29(3): 261-266.
[4] Xu D, Liu L F, Xiao G N, et al. Improved textured La2Zr2O7 buffer layers on bi-axially textured Ni-W substrates using CeO2 seed layers for YBa2Cu3O7-x coated conductors[J]. Thin Solid Films, 2013, 548: 502-508.
[5] Kim K H, Norton D P, Budai J D, et al. Epitaxial structure and transport in LaTiO3+x films on (001) SrTiO3[J]. Physica Status Solidi (A), 2003, 200(2): 346-351.
[6] Chung J K, Ko R K, Shi D Q, et al. Use of SrTiO3 as a single buffer layer for RABiTS YBCO coated conductor[J]. IEEE Transactions on Applied Superconductivity, 2005, 15(2): 3020-3023.
[7] Wang S S, Wang L, Gu B F. High quality YBCO film growth on SrTiO3-buffered LaAlO3 substrate by full solution method[J]. Journal of Materials Science & Technology, 2008, 42(6): 899-902.
[8] Zhu X B, Chen L, Liu S M, et al. Effect of seed layers on the preparation of SrTiO3 buffer layers on Ni tapes via sol-gel method[J]. Physica C: Superconductivity, 2004, 415(1): 57-61.
[9] 田震, 于淼, 熊杰, 等. MOD 法在双轴织构Ni-W 合金基片上制备 SrTiO3缓冲层[J]. 低温与超导, 2007, 35(4): 316-318, 348. Tian Zhen, Yu Miao, Xiong Jie, et al. Preparation of SrTiO3 buffer layers on Ni-W tapes by MOD method[J]. Cryogenics and Superconductivity, 2007, 35(4): 316-318.
[10] Sathyamurthy S, Salama K. Chemical cleaning treatment of textured nickel for the deposition of epitaxial thin films[J]. Superconductor Science and Technology, 2001, 14(8): 643-645.
[11] Zhu X B, Liu S M, Hao H R, et al. Growth of SrTiO3 thin films on BaxSr1-xTiO3 (x=0.3, 0.5) seed layers on Ni(200) substrates using spin coating technique[J]. Scripta Materialia, 2004, 51(7): 659-663.
