通过实验研究了基于原位反应的叠氮化银微装药制备方法及起爆性能。采用化学沉淀法合成纳米氧化银颗粒，并以纳米氧化银为前驱体，基于气固原位反应法成功制备了叠氮化银。利用红外光谱仪（FT-IR）、X射线衍射仪（XRD）分析叠氮化反应时间对叠氮化银形貌及组成的影响，表明叠氮化反应1 h开始生成叠氮化银，叠氮化反应至6 h纳米氧化银完全转化为叠氮化银。利用探针法对叠氮化银微装药起爆过程进行监测，结果显示叠氮化银微装药被Ni-Cr桥线成功引爆，驱动飞片的平均速度为2328 m/s，证明基于原位反应制备的叠氮化银不仅具有优越的热稳定性而且具有优异的驱动飞片能力和起爆性能，因此在MEMS系统中具有广泛的应用前景。
In situ fabrication of silver azide micro-charge is investigated. Chemical precipitation method is employed to synthesize silver oxide nanoparticles. Silver azide is successfully fabricated by gas and solid phase in situ method using silver oxide nanoparticles as precursors. The effects of azidereacton time on microstructure and composition of silver azide are evaluated. Results show that silver azide is gradually synthesized in 1 h and that the increasing reaction time can promote the conversion of silver oxide nanoparticles to silver azide. Furthermore, the probe method is employed to measure the average velocity of flyer driven by silver azide micro-charge. Silver azide can be ignited by the Ni-Cr bridge wire and the average velocity of flyer is 2328 m·s-1. Due to its excellent detonation ability and thermal stability, silver azide micro-charge has a favorable application prospect in MEMS.
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