[1] Orji N G, Badaroglu M, Barnes B M, et al. Metrology for the next generation of semiconductor devices[J]. Nature Electronics, 2018, 1: 532-547.
[2] Sun Y M, Liu N, Cui Y. Promises and challenges of nanomaterials for lithium-based rechargeable batteries[J]. Nature Energy, 2016, 1(7): 16071.
[3] Shi J J, Votruba A R, Farokhzad O C, et al. Nanotechnology in drug delivery and tissue engineering: From discovery to applications[J]. Nano Letters, 2010, 10(9): 3223-3230.
[4] Lin C H, Cheng B, Li T Y, et al. Orthogonal lithography for halide perovskite optoelectronic nanodevices[J]. ACS Nano, 2019, 13(2): 1168-1176.
[5] Kasani S, Curtin K, Wu N Q. A review of 2D and 3D plasmonic nanostructure array patterns: Fabrication, light management and sensing applications[J]. Nanophotonics, 2019, 8(12): 2065-2089.
[6] Zhao D, Han A P, Qiu M. Ice lithography for 3D nanofabrication[J]. Science Bulletin, 2019, 64(12): 865-871.
[7] King G M, Schürmann G, Branton D, et al. Nanometer patterning with ice[J]. Nano Letters, 2005, 5(6): 1157-1160.
[8] Han A P, Kuan A, Golovchenko J, et al. Nanopatterning on nonplanar and fragile substrates with ice resists[J]. Nano Letters, 2012, 12(2): 1018-1021.
[9] Hong Y, Zhao D, Liu D L, et al. Three-dimensional in situ electron-beam lithography using water ice[J]. Nano Letters, 2018, 18(8): 5036-5041.
[10] Elsukova A, Han A P, Zhao D, et al. Effect of molecular weight on the feature size in organic ice resists[J]. Nano Letters, 2018, 18(12): 7576-7582.
[11] Han A P, Chervinsky J, Branton D, et al. An ice lithography instrument[J]. Review of Scientific Instruments, 2011, 82(6): 065110.
[12] Tiddi W, Elsukova A, Beleggia M, et al. Organic ice resists for 3D electron-beam processing: Instrumentation and operation[J]. Microelectronic Engineering, 2018, 192: 38-43.
[13] Hong Y, Zhao D, Liu D L, et al. Development of an in situ nanofabrication instrument for ice lithography[J]. Microelectronic Engineering, 2020, 224: 111251.
[14] Zheng R, Qi L M, Li S Z, et al. Liquid hydrogen temperature cryostage for ice-assisted electron-beam lithography[J]. IEEE Transactions on Instrumentation and Measurement, 2024, 73: 1504304.
[15] Yang Z R, Wu S, Zhao K, et al. Patterning on living tardigrades[J]. Nano Letters, 2025, 25(15): 6168-6175.
[16] Talmon Y, Davis H T, Scriven L E, et al. Mass loss and etching of frozen hydrated specimens[J]. Journal of Microscopy, 1979, 117(3): 321-332.
[17] Tiddi W, Elsukova A, Le H T, et al. Organic ice resists[J]. Nano Letters, 2017, 17(12): 7886-7891.
[18] 洪宇. 水基冰刻电子束曝光微纳加工技术及应用[D]. 杭州: 浙江大学, 2021.
[19] Hong Y, Zhao D, Wang J Y, et al. Solvent-free nanofabrication based on ice-assisted electron-beam lithography[J]. Nano Letters, 2020, 20(12): 8841-8846.
[20] Yao G N, Zhao D, Hong Y, et al. Ice-assisted electron-beam lithography for MoS2 transistors with extremely low-energy electrons[J]. Nanoscale Advances, 2022, 4(11): 2479-2483.
[21] Qiu M, Sun X, Jin B, et al. Ice-assisted soft-landing deposition for van der Waals integration[J/OL]. Research Squrae, 2024, https://doi.org/10.21203/rs.3.rs-3725639/v1.
[22] Liu K P, Guo J Y, Tian S Q, et al. A simulation study of grayscale ice lithography for spiral phase plates in near infrared wavelengths[J]. Microelectronic Engineering, 2025, 297: 112308.
[23] Guo J Y, Liu K P, Tian S Q, et al. Multiple Aztec steps as an angle resolved micro-spectrometer by grayscale ice lithography[J]. Microelectronic Engineering, 2025, 297: 112309.
[24] Guo J Y, Tian S Q, Yuan W T, et al. Simulation study of three-dimensional grayscale ice lithography on amorphous solid water for blazed gratings[J]. Microelectronic Engineering, 2024, 284: 112129.
[25] Zhao D, Chang B D, Beleggia M. Electron-beam patterning of vapor-deposited solid anisole[J]. ACS Applied Materials & Interfaces, 2020, 12(5): 6436-6441.
[26] Haque R I, Waafi A K, Chang B D, et al. Ice lithography using tungsten hexacarbonyl[J]. Micro and Nano Engineering, 2023, 18: 100171.
[27] Chang B D, Anand G A E, Le H T, et al. 3D ice lithography and post-processing using gold organometallic precursor[J]. Additive Manufacturing, 2025, 98: 104645.
[28] Wu S, Zhao D, Yao G N, et al. Lithographic properties of amorphous solid water upon exposure to electrons[J]. Applied Surface Science, 2021, 539: 148265.
[29] 姚光南. 面向二维材料加工应用的冰胶电子束光刻[D]. 杭州: 浙江大学, 2022.
[30] Haque R I, Waafi A K, Jaemin K, et al. 80 K cryogenic stage for ice lithography[J]. Micro and Nano Engineering, 2022, 14: 100101.
[31] Qi L M, Zheng R, Liu D L, et al. A micromachined Joule-Thomson cryocooler for ice lithography[J]. Microelectronic Engineering, 2024, 289: 112180.
[32] Wang H, Zhang W, Ladika D, et al. Two-photon polymerization lithography for optics and photonics: Fundamentals, materials, technologies, and applications[J]. Advanced Functional Materials, 2023, 33(39): 2214211.
[33] Wu S, Zhao D, Qiu M. 3D nanoprinting by electron-beam with an ice resist[J]. ACS Applied Materials & Interfaces, 2022, 14(1): 1652-1658.
[34] Waafi A K, Chang B D, Lyngholm-Kjærby J, et al. Electron beam processing of organic ice for low-toxicity submicrometer additive manufacturing[J]. Additive Manufacturing, 2024, 84: 104114.
[35] Gardener J A, Golovchenko J A. Ice-assisted electron beam lithography of graphene[J]. Nanotechnology, 2012, 23(18): 185302.
[36] Yao G N, Zhao D, Hong Y, et al. Direct electron-beam patterning of monolayer MoS2 with ice[J]. Nanoscale, 2020, 12(44): 22473-22477.
[37] Jin B B, Hong Y, Li Z Q, et al. Ice-assisted electron-beam lithography for halide perovskite optoelectronic nanodevices[J]. Nano Energy, 2022, 102: 107692.
[38] Lu Y H, Jin B B, Zheng R, et al. Production and patterning of fluorescent quantum dots by cryogenic electron-beam writing[J]. ACS Applied Materials & Interfaces, 2023, 15(9): 12154-12160.
[39] Chiaro D A, Hager T J, Renshaw K T, et al. Precise fabrication of graphite-like material directly on a biological membrane enabled by ethanol ice resist[J]. Nano Letters, 2025, 25(17): 7107-7114.
[40] Burns R, Chiaro D, Davison H, et al. Stabilizing metal halide perovskite films via chemical vapor deposition and cryogenic electron beam patterning[J]. Small, 2025, 21(2): 2406815.
[41] Zheng R, Zhao D, Lu Y H, et al. Recording messages on nonplanar objects by cryogenic electron-beam writing[J]. Advanced Functional Materials, 2022, 32(19): 2112894.
[42] Yang Z R, Wu S, Zhao K, et al. Tattooing water bears: Microfabrication on living organisms[J]. Science Bulletin, 2025, S2095-9273(25): 00361-5.