抗过载片上集成MEMS悬浮螺旋电感

抗过载片上集成MEMS悬浮螺旋电感

李建华, 卢冲赢, 徐立新, 武浩

Anti-overloading on-chip integrated MEMS suspended spiral inductor

LI Jianhua, LU Chongying, XU Lixin, WU Hao

科技导报 . 2015, (5): 57 -61 . DOI: 10.3981/j.issn.1000-7857.2015.05.008