Research on Surface Modification of SiC Powder with Aminoorganosilanes in the Semiconductor Manufacturing

TIE Shengnian;LI Xing

Science & Technology Review ›› 2011, Vol. 29 ›› Issue (19) : 29-33.

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Science & Technology Review ›› 2011, Vol. 29 ›› Issue (19) : 29-33. DOI: 10.3981/j.issn.1000-7857.2011.19.003
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Research on Surface Modification of SiC Powder with Aminoorganosilanes in the Semiconductor Manufacturing

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 29(19): 29-33 https://doi.org/10.3981/j.issn.1000-7857.2011.19.003

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