高环境稳定性多孔氧化硅减反膜的制备及表征
孙菁华, 丁瑞敏, 张聪, 张策, 徐耀
Preparation and characterization of porous silica antireflective coating of high environment stability
SUN Jinghua, DING Ruimin, ZHANG Cong, ZHANG Ce, XU Yao
科技导报
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2015, (9): 31
-34
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DOI: 10.3981/j.issn.1000-7857.2015.09.004
