扬帆芯未来，助力新基建，大力推进第三代半导体制造装备国产化
王志越, 巩小亮, 付丙磊
Promote the domestication of the third-generation semiconductor equipment to embrace the dawn of semiconductors and consolidate the new infrastructure
WANG Zhiyue, GONG Xiaoliang, FU Binglei
科技导报
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2021, (14): 83
-91
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DOI: 10.3981/j.issn.1000-7857.2021.14.008
