一种CMOS集成MEMS片上螺旋电感设计与仿真

一种CMOS集成MEMS片上螺旋电感设计与仿真

卢冲赢;徐立新;王婷

Design and Simulation of a CMOS Integrated MEMS On-chip Spiral Inductor

LU Chongying;XU Lixin;WANG Ting

. 2012, (6): 20 -23 . DOI: 10.3981/j.issn.1000-7857.2012.06.001