Design and Simulation of a CMOS Integrated MEMS On-chip Spiral Inductor

LU Chongying;XU Lixin;WANG Ting

Science & Technology Review ›› 2012, Vol. 30 ›› Issue (6) : 20-23.

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Science & Technology Review ›› 2012, Vol. 30 ›› Issue (6) : 20-23. DOI: 10.3981/j.issn.1000-7857.2012.06.001
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Design and Simulation of a CMOS Integrated MEMS On-chip Spiral Inductor

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 30(6): 20-23 https://doi.org/10.3981/j.issn.1000-7857.2012.06.001

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