Dynamic Measurement of Parameters of MEMS Based on Correlation of Blurred Image

LUO Yuan;YANG Bo;ZHANG Yi

Science & Technology Review ›› 2012, Vol. 30 ›› Issue (27) : 45-49.

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Science & Technology Review ›› 2012, Vol. 30 ›› Issue (27) : 45-49. DOI: 10.3981/j.issn.1000-7857.2012.27.006
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Dynamic Measurement of Parameters of MEMS Based on Correlation of Blurred Image

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 30(27): 45-49 https://doi.org/10.3981/j.issn.1000-7857.2012.27.006

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