Promote the domestication of the third-generation semiconductor equipment to embrace the dawn of semiconductors and consolidate the new infrastructure

doi:10.3981/j.issn.1000-7857.2021.14.008

WANG Zhiyue, GONG Xiaoliang, FU Binglei

Science & Technology Review ›› 2021, Vol. 39 ›› Issue (14) : 83-91.

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Science & Technology Review ›› 2021, Vol. 39 ›› Issue (14) : 83-91. DOI: 10.3981/j.issn.1000-7857.2021.14.008

Exclusive: Innovation and development of the third generation semiconductor

Promote the domestication of the third-generation semiconductor equipment to embrace the dawn of semiconductors and consolidate the new infrastructure

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 39(14): 83-91 https://doi.org/10.3981/j.issn.1000-7857.2021.14.008

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