Promote the domestication of the third-generation semiconductor equipment to embrace the dawn of semiconductors and consolidate the new infrastructure

WANG Zhiyue; GONG Xiaoliang; FU Binglei

doi:10.3981/j.issn.1000-7857.2021.14.008

WANG Zhiyue, GONG Xiaoliang, FU Binglei

Science & Technology Review ›› 2021, Vol. 39 ›› Issue (14) : 83-91.

PDF(2816 KB)

Science & Technology Review ›› 2021, Vol. 39 ›› Issue (14) : 83-91. DOI: 10.3981/j.issn.1000-7857.2021.14.008

Exclusive: Innovation and development of the third generation semiconductor

Promote the domestication of the third-generation semiconductor equipment to embrace the dawn of semiconductors and consolidate the new infrastructure

{{article.zuoZhe_EN}}

Author information -

About authors:

Corresponding authors:

HeighLight

Abstract

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 39(14): 83-91 https://doi.org/10.3981/j.issn.1000-7857.2021.14.008

References

List( Publishing order | Descend order by publishing year | Descend order by cited within ) Chart analysis

References

Funding

RIGHTS & PERMISSIONS

PDF(2816 KB)

Accesses

Citation

Detail

Sections

Recommended

Please choose a citation manager

Content to export