Shanghai Third Generation Synchrotron Radiation Facility and Its Application in Microelectronics and Micromachine

Science & Technology Review ›› 1999, Vol. 17 ›› Issue (9906) : 36-38.

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PDF(571 KB)
Science & Technology Review ›› 1999, Vol. 17 ›› Issue (9906) : 36-38.
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Shanghai Third Generation Synchrotron Radiation Facility and Its Application in Microelectronics and Micromachine

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1999, 17(9906): 36-38

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