Anti-overloading on-chip integrated MEMS suspended spiral inductor

LI Jianhua, LU Chongying, XU Lixin, WU Hao

Science & Technology Review ›› 2015, Vol. 33 ›› Issue (5) : 57-61.

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Science & Technology Review ›› 2015, Vol. 33 ›› Issue (5) : 57-61. DOI: 10.3981/j.issn.1000-7857.2015.05.008
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Anti-overloading on-chip integrated MEMS suspended spiral inductor

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 33(5): 57-61 https://doi.org/10.3981/j.issn.1000-7857.2015.05.008

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