声表面行波器件及其在微纳领域的应用

doi:10.3981/j.issn.1000-7857.2019.06.015

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Abstract: In recent years, as the scientific studies in the field of biology and medicine come down to micron or even nanometer scales, many manipulation methods of micro-nano fluids and particles have emerged, such as the optical drive, the magnetic drive and the chemical mode drive. The sound-driven method has been widely used in the micro-nano field due to its features of non-contact and biocompatibility, and has broad application prospects in the fields of biomedicine and diagnostics. This paper outlines the basic structure of the traveling acoustic surface waves (TSAW) generating device, the structure, the parameters, the types of the interdigital transducer (IDT) and the internal mechanism that causes the traveling surface acoustic waves. The acoustic control mechanism of the microfluidic state and the particles in the microfluids is discussed. Based on the current research status of the technology at home and abroad, the advantages of the traveling acoustic surface waves, as compared to other physical fields in the micro-nano field are analyzed. Finally, in view of the technical difficulties of the traveling acoustic surface waves applied in the micro-nano field and the problems existing in the research process, some research directions of the technology are proposed, and a reasonable prospect for the future development trend is suggested.

Key words： surface acoustic waves interdigital transducer traveling acoustic surface waves microfluidics microparticle manipulation

Received: 06 December 2018

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	DONG Huijuan
	WANG Jingxuan
	LI Tianlong

Cite this article:

DONG Huijuan,WANG Jingxuan,LI Tianlong. Device of travelling surface acoustic wave and its application in the field of micro-nano scales[J]. Science & Technology Review, 2019, 37(6): 114-128.

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http://www.kjdb.org/EN/10.3981/j.issn.1000-7857.2019.06.015 OR http://www.kjdb.org/EN/Y2019/V37/I6/114

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