Device of travelling surface acoustic wave and its application in the field of micro-nano scales

DONG Huijuan; WANG Jingxuan; LI Tianlong

doi:10.3981/j.issn.1000-7857.2019.06.015

DONG Huijuan, WANG Jingxuan, LI Tianlong

Science & Technology Review ›› 2019, Vol. 37 ›› Issue (6) : 114-128.

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Science & Technology Review ›› 2019, Vol. 37 ›› Issue (6) : 114-128. DOI: 10.3981/j.issn.1000-7857.2019.06.015

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Device of travelling surface acoustic wave and its application in the field of micro-nano scales

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 37(6): 114-128 https://doi.org/10.3981/j.issn.1000-7857.2019.06.015

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