In order to obtain the high resolution measurement dynamic parameters for Micro Electro Mechanical System (MEMS) microstructure, the microstructure of moving image sequence is acquired by using stroboscopic imaging technology. One kind method based on the phase correlation technique and Singular Value Decomposition (SVD) technique combining with sub-pixel measurement is proposed. By means of phase correlation, the method is able to transform the spatial coordinate of the images into the parameter space in frequency domain coordinates. And then through the SVD technique, a correlation matrix is gained. Finally using the least-squares fitting, the results of sub-pixel level displacement measurement are got. The experimental results indicate that with the method, the amplitude measurement of MEMS microstructure plane motion is able to reach at the precision of sub-pixel, and could effectively reduce uneven illumination effect on the measuring result, thereby increasing the stability of measurement results and reducing the measuring error.