Research on Surface Modification of SiC Powder with Aminoorganosilanes in the Semiconductor Manufacturing
Received date: 2010-09-06
Revised date: 2011-05-26
Online published: 2011-07-08
TIE Shengnian;LI Xing . Research on Surface Modification of SiC Powder with Aminoorganosilanes in the Semiconductor Manufacturing[J]. Science & Technology Review, 2011 , 29(19) : 29 -33 . DOI: 10.3981/j.issn.1000-7857.2011.19.003
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