The developmental progress of Exploding Foil Initiator system (EFIs) is summarized, and analyses on the development and application prospects of high-voltage transformer, pulsed power capacitor, and high-voltage switch are emphasized. In the meantime, the relevant domestic and foreign research level are briefly compared. By combining with the research and development trend of foreign research, the development of EFIs is analyzed. Some conclusions could provide the reference for the optimal design of EFIs with miniaturization, lower energy, and higher integration.