The adhesion and removal of micro-particles are very important for the quality control of many industrial processes. They are also directly related to the environmental pollution and occupational health. The study on micro-particle adhesion force measurement techniques is helpful to control micro-particles adhesion pollution and remove micro-particles on the surface. In order to understand the progress in the micro-particle adhesion force measurement techniques, the studies on this area are reviewed. Based on the databases (Ei Compendex, Ei Inspec, and Elsevier Science), three subject words (Particle, Adhesion, and Measurement) are used and about 150 papers in the area published in the years from 2001 to 2010 are found from the search results. The statistics analysis on the publication time, authors' countries, and topics of measurement techniques is conducted. Various micro-particle adhesion force measurement techniques including the AFM detachment technique, the micromechanical detachment technique, the centrifugal detachment technique, the electrostatic detachment technique, the vibration detachment technique, and the laser detachment technique are discussed. The advantages and disadvantages of those micro-particle adhesion force measurement techniques are compared with each other. In the end, the development directions on this field are pointed out.
ZHONG Jian;WU Chao
. Progress in Micro-particle Adhesion Force Measurement Techniques[J]. Science & Technology Review, 2012
, 30(3)
: 67
-73
.
DOI: 10.3981/j.issn.1000-7857.2012.03.011