Influence of ion beam assistance on plasma of twin magnetron MF reactive sputtering
WANG Yonglin, WU Jianhua, LIU Hongyan, YAN Yue
Science & Technology Review . 2021, (9): 61 -65 .  DOI: 10.3981/j.issn.1000-7857.2021.09.007

Contact

  • Add：No. 86 Xueyuan South Road, Haidian District, Beijing　 Postal Code：100081
  • Tel: +86-10-62138113　Fax: +86-10-62138113
  • E-mail：kjdbbjb@cast.org.cn

    • Visited

      Total visitors:
      Visitors of today:
      Now online:
    Copyright © Science & Technology Review, All Rights Reserved.